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USTC ua qhov tseem ceeb hauv kev lag luam laser micro-nano manufacturing

Tus kws tshawb fawb Yang Liang pab pawg tshawb fawb ntawm Suzhou lub koom haum rau Kev Kawm Qib Siab ntawm University of Science thiab Technology ntawm Tuam Tshoj tau tsim ib txoj hauv kev tshiab rau hlau oxide semiconductor laser micro-nano manufacturing, uas pom tau tias laser luam ntawv ntawm ZnO semiconductor qauv nrog submicron precision, thiab ua ke. nws nrog hlau laser luam ntawv, thawj zaug tau txheeb xyuas qhov sib xyaw laser ncaj qha sau ntawm microelectronic Cheebtsam thiab circuits xws li diodes, triodes, memristors thiab encryption circuits, yog li txuas ntxiv cov ntawv thov scenarios ntawm laser micro-nano ua rau thaj chaw ntawm microelectronics, hauv flexible electronics, advanced sensors, Intelligent MEMS thiab lwm yam kev lag luam muaj qhov tseem ceeb daim ntawv thov kev cia siab. Cov txiaj ntsig tshawb fawb tsis ntev los no tau tshaj tawm hauv "Nature Communications" nyob rau hauv lub npe "Laser Printed Microelectronics".

Printed electronics yog ib qho kev siv technology tshiab uas siv cov txheej txheem luam ntawv los tsim cov khoom siv hluav taws xob. Nws ua tau raws li cov yam ntxwv ntawm kev yooj yim thiab tus kheej ntawm lub cim tshiab ntawm cov khoom siv hluav taws xob, thiab yuav coj lub kiv puag ncig thev naus laus zis tshiab rau kev lag luam microelectronics. Tshaj li 20 xyoo dhau los, inkjet luam ntawv, laser-induced hloov chaw (LIFT), lossis lwm yam kev luam ntawv tau ua haujlwm zoo los ua kom muaj kev ua haujlwm ntawm cov khoom siv organic thiab inorganic microelectronic yam tsis tas yuav muaj chaw huv huv. Txawm li cas los xij, qhov loj me me ntawm cov txheej txheem luam ntawv saum toj no feem ntau yog nyob ntawm qhov kev txiav txim ntawm kaum ntawm microns, thiab feem ntau yuav tsum muaj cov txheej txheem kub kub tom qab ua tiav, lossis tso siab rau kev sib xyaw ntawm ntau cov txheej txheem kom ua tiav cov khoom siv ua haujlwm. Laser micro-nano ua tshuab siv cov kev sib cuam tshuam nonlinear ntawm laser pulses thiab cov ntaub ntawv, thiab tuaj yeem ua tiav cov qauv kev ua haujlwm thiab cov khoom siv ntxiv uas nyuaj rau kev ua tiav los ntawm cov txheej txheem ib txwm muaj nrog qhov tseeb ntawm <100 nm. Txawm li cas los xij, feem ntau ntawm cov qauv laser micro-nano-fabricated tam sim no yog tib cov ntaub ntawv polymer lossis cov ntaub ntawv hlau. Qhov tsis muaj laser direct sau txoj kev rau cov ntaub ntawv semiconductor kuj ua rau nws nyuaj rau nthuav daim ntawv thov ntawm laser micro-nano ua technology rau lub teb ntawm microelectronic li.

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Hauv qhov kev tshawb fawb no, tus kws tshawb fawb Yang Liang, koom tes nrog cov kws tshawb fawb hauv lub teb chaws Yelemees thiab Australia, tau tsim kho tshiab laser luam ntawv ua tshuab luam ntawv rau cov khoom siv hluav taws xob ua haujlwm, paub txog cov khoom siv hluav taws xob (ZnO) thiab tus neeg xyuas pib (Composite laser printing ntawm ntau yam ntaub ntawv xws li Pt thiab Ag) (Daim duab 1), thiab tsis tas yuav muaj qhov kub thiab txias tom qab ua cov txheej txheem txhua, thiab qhov tsawg kawg nkaus qhov loj me yog <1 µm. Qhov kev ua tiav no ua rau nws tuaj yeem hloov kho tus qauv tsim thiab luam ntawv ntawm cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, thiab txawm tias cov txheej txheem ntawm cov ntaub ntawv insulating raws li kev ua haujlwm ntawm cov khoom siv hluav taws xob microelectronic, uas zoo heev txhim kho qhov tseeb, yoog raws, thiab kev tswj hwm ntawm kev luam ntawv microelectronic li. Raws li lub hauv paus no, pab neeg tshawb fawb tau ua tiav qhov kev sib xyaw ntawm laser ncaj qha sau ntawv ntawm diodes, memristors thiab lub cev tsis tuaj yeem rov ua dua tshiab (Daim duab 2). Cov thev naus laus zis no tau sib xws nrog cov tshuaj inkjet luam ntawv thiab lwm yam thev naus laus zis, thiab yuav tsum tau txuas ntxiv mus rau kev luam ntawv ntawm ntau yam P-hom thiab N-hom semiconductor hlau oxide cov ntaub ntawv, muab cov txheej txheem tshiab rau kev ua cov txheej txheem, loj-scale, Peb-dimensional haumxeeb microelectronic li.

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ThesisTau qhov twg los: https://www.nature.com/articles/s41467-023-36722-7


Post lub sij hawm: Mar-09-2023